<http://data.silknow.org/production/a035a8b9-5999-3cd8-a972-91ab130f687e>	<http://erlangen-crm.org/current/P32_used_general_technique>	<http://data.silknow.org/vocabulary/236> .
<http://data.silknow.org/production/a035a8b9-5999-3cd8-a972-91ab130f687e>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://erlangen-crm.org/current/E12_Production> .
<http://data.silknow.org/production/a035a8b9-5999-3cd8-a972-91ab130f687e>	<http://erlangen-crm.org/current/P4_has_time-span>	<http://data.silknow.org/timespan/1994> .
<http://data.silknow.org/production/a035a8b9-5999-3cd8-a972-91ab130f687e>	<http://erlangen-crm.org/current/P32_used_general_technique>	"resist patterning"@en .
<http://data.silknow.org/production/a035a8b9-5999-3cd8-a972-91ab130f687e>	<http://erlangen-crm.org/current/P108_has_produced>	<http://data.silknow.org/object/46e183a1-6b7b-37d9-be64-5343624f46e9> .
<http://data.silknow.org/production/a035a8b9-5999-3cd8-a972-91ab130f687e>	<http://erlangen-crm.org/current/P126_employed>	<http://data.silknow.org/vocabulary/900> .
<http://data.silknow.org/production/a035a8b9-5999-3cd8-a972-91ab130f687e>	<http://erlangen-crm.org/current/P9_consists_of>	<http://data.silknow.org/production/a035a8b9-5999-3cd8-a972-91ab130f687e/activity/1> .